Molecular beam epitaxy from compact Mini MBE to multi-chamber research platforms, with effusion cells and evaporators
Field-proven stand-alone MBE configurations for reliable thin film deposition.
Research-grade MBE assembled under Class 10 cleanroom conditions. Base pressure < 5 × 10⁻¹¹ mbar, cVac automation, and integrated RHEED/BFM monitoring.
Full-featured MBE in compact form — up to 11 effusion sources, 206/256 mm chamber, optional LT-STM/AFM integration for combined growth and atomic-resolution analysis below 5 K.
Multi-chamber UHV platform with up to 10 evaporation ports for complex heterostructure growth.
CreaTec's 4 K LT-STM/AFM, an MBE growth chamber, a buffer chamber and a load lock on one frame. Samples on flag-style holders move from growth to the microscope without leaving ultra-high vacuum.
Operating temperatures from -60 °C to 2400 °C. TUBO, HTC, DFC, CLC, CRC, V-CRC, EBE, OLED, and multi-cell versions, manufactured to evaporate almost every material.