Fully Automated Systems
Recipe-driven platforms that run hands-off from load-lock to finished film: iMBE, iPLD, and semi-industrial sputtering
iMBE Systems
Fully automated MBE with up to ten sources and 4-inch substrates for repeatable, semi-production epitaxial growth.
iPLD Systems
Autonomous pulsed laser deposition with in-situ target exchange and reactive-atmosphere operation to 10 mbar.
Semi-Industrial Sputtering Systems
Automated HV unit for semi-production coating of metal and dielectric thin films.