Magnetron Sputtering
From bench-top PRIMS to UHV research and industrial coating systems, with magnetron sources and power supplies
Standard Sputtering Systems
Stand-alone magnetron sputtering with proven standard configurations for dependable thin film work.
PRIMS Basic Sputtering System
Compact plug-and-play magnetron sputtering with up to three 2-inch sources for labs and teaching cleanrooms.
Advanced Sputtering Systems
Customized multi-chamber magnetron sputtering to UHV with DC, RF and pulsed-DC modes, HiPIMS on request, and substrates to 6 inches.
Sputter Sources & Power Supplies
PREVAC magnetron sputter sources for 2″ and 3″ targets (DN 63–160 CF flanges), compatible with DC, RF, pulsed-DC and HiPIMS power supplies, and PREVAC's M600DC-PS and M1600-PDC magnetron power supplies.