Deposition
Systems and Components for PLD, MBE, Magnetron Sputtering, Ion-Beam Etching, Spin Coaters, Rapid Thermal Annealing
Also: MiniMBE, Cold Atom Sources
MBE Systems
We will help you design and implement complex requirements for your next Molecular Beam Epitaxy (MBE) System, even for exotic materials so that you can focus on your research. With our MBE partner CreaTec we offer 25 years of expertise in building MBE Systems for any application you can envision. We grow with you!
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MiniMBE
The CreaTec MiniMBE System is designed for epitaxial growth on small samples with a compact system size. It includes a growth chamber, load-lock chamber, and optional buffer chamber, equipped with effusion cells, a manipulator, cooling units, and optimized pumping. Key features are face-down zero focal point geometry for uniform deposition.
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Sputter Deposition - 032 PRIMS
Simple and fully functional sputter deposition unit for applying reproducible thin-film layers. Plug & work compact design. The process chamber contains 3 ports for magnetron sputtering sources (for metals and inorganics), mounted in a sputter-down configuration. Up to two sources used at the same time (co-deposition). The substrate stage is intended for up to 2-inch diameter samples, with a heating & rotation option.
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Semi-industrial MS systems
Semi-production HV system for fast and repeatable processes of applying thin layers with maximally automated operation support. Process chamber design allows for a combination of several deposition techniques, among others: DC/RF magnetron sputtering, reactive sputtering, and evaporation using an electron beam.
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Evaporators
CreaTec Effusion Cells are used in ultra-high vacuum (UHV) evaporation systems to generate ultrapure molecular and atomic beams from a large variety of elements and compounds. The different types of effusion cells are manufactured to evaporate almost every material. Operating temperatures can range from room temperature up to 2400°C.
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